Mocvd Heater and Core Parts Rhenium and Rhenium Alloy

Product Description

Material Description

CISRI-AT&M Refractory Metal Materials is the earliest company in China which is engaged in the research and development of Rhenium and Rhenium Alloy. After nearly 60 years of development, it has formed a series of pure rhenium, tungsten-rhenium and molybdenum-rhenium products. These products are widely applied for heating body, thermocouples for temperature measurement, cathodes of electronic tubes, and high-temperature components.

CISRI-AT&M Refractory Metal Materials can either provide you with the required semi-finished products, or offer you the customized products according to your actual needs.

Company Success Stories

Our company provides MOCVD heaters and related parts for a number of well-known equipment manufacturers. The company helps equipment manufacturers and end users of MOCVD equipment to reduce costs and improve competitiveness.

Our Advantages

Having inherited the 60 years of experience of the Central Iron and Steel Research Institute, our company is equipped with advanced technology for the preparation of refractory metal materials, and is one of the domestic enterprises that first participated in the design and development of MOCVD heaters.

We can work with you to design and improve MOCVD equipment. More than 20 professional technical engineers are always ready to go to your production lines and give you their suggestions.

We never stop technological innovation. As a listed company directly under the nation, we are charged with the task of upgrading the refractory metal technology. Every year we invest money into research and development and witness new equipment put into production and the birth of new products.

Having passed the certification of ISO9001, ISO14001 and OHSAS18001, the company is qualified to provide you with high quality products.

Application Principles and IntroductionMOCVD epitaxial equipment are used in the LED industry. The MO source and the carrier gas are transferred to the reaction chamber with the gas flow controlled by a mass flow meter. After coming into the reaction chamber, the reactants are transferred to the surface of the substrate via the carrier gas to form epitaxial thin films.

As the most important part of MOCVD, the reaction chamber decides properties of materials and the quality of equipment. As the place for all gases to be mixed and react, the reaction chamber is usually made of stainless steel (with cooling water circuit) or quartz (which is not used any more because it's too dangerous). The inner wall of the chamber typically has lining made of quartz or high-temperature ceramics. In the chamber there is a wafer carrier/suscepetor which is used to carry the substrate. As the wafer carrier must be able to efficiently absorb energy from the heater to reach the desired temperature needed for film growth, and can not react with the reaction gases, it is mostly made of graphite. For the growth of GaN, as NH3, which needs to be the reaction source, is corrosive at high temperature, the graphite is coated with SiC for protection. As to the installation of the heater, it is installed within the reaction chamber in some cases, and outside the reaction chamber in other cases. Inside the reaction chamber there are many channels for the cooling water to flow to avoid the overheating of the chamber when thin films are growing.

 

Product Specifications

Different Options for You

 

Name	Main Model	Main Specification (mm)
Pure Rhenium Sheet	>99.99%Re	0.1min.x (10~50)x2000max.
Pure Rhenium Strip	>99.99%Re	14X14X400
Pure Rhenium Rod	>99.99%Re	Φ5~Φ100X600
MoRe Wire	Mo-14%Re Mo-42%Re Mo-44.5%Re Mo-47.5%Re	Φ0.1,Φ0.2,Φ0.25, Φ0.3,Φ0.35,Φ0.5
MoRe Rod		Φ1~Φ30XL
MoRe Sheet		0.2min. x (10~350) x 600max
MoRe Foil		0.04min.x100xL
Tungsten-Rhenium Thermocouple Wire	WRe3/25 WRe5/26	Φ0.1,Φ0.2,Φ0.25, Φ0.3,Φ0.35,Φ0.5
Tungsten-Rhenium Alloy Wire	WRe3%, WRe5%, WRe25%, WRe26%	Φ0.1,Φ0.2,Φ0.25, Φ0.3,Φ0.35,Φ0.5
Tungsten-Rhenium Alloy Rod	WRe3%, WRe5%, WRe25%, WRe26%	Φ1~Φ17
Tungsten-Rhenium Alloy Sheet	WRe3%, WRe5%, WRe25%, WRe26%	0.2min. x (10~350) x 600max